From tberg at snf.stanford.edu Tue Feb 7 14:13:47 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Feb 2012 14:13:47 -0800 Subject: Comment tel SNF 2012-02-07 14:13:46: down for water Message-ID: From tberg at snf.stanford.edu Tue Feb 14 13:49:27 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:49:27 -0800 Subject: Comment tel SNF 2012-02-07 14:13:46: down for water Message-ID: water back on From tberg at snf.stanford.edu Tue Feb 14 13:49:56 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:49:56 -0800 Subject: Shutdown tel SNF 2011-12-13 11:35:11: renovation Message-ID: System is back on Heater has issues From tberg at snf.stanford.edu Tue Feb 14 13:50:06 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:50:06 -0800 Subject: Problem tel SNF 2012-02-14 13:50:06: System is back on Heater has issues Message-ID: From tberg at snf.stanford.edu Wed Feb 15 09:33:22 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:33:22 -0800 Subject: Problem tel SNF 2012-02-14 13:50:06: System is back on Heater has issues Message-ID: System is back on everything is functional. Heater set to 300C. May need a test. From tberg at snf.stanford.edu Wed Feb 15 09:33:55 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Feb 2012 09:33:55 -0800 Subject: Problem tel SNF 2012-02-15 09:33:54: May need a test Message-ID: System is functional. may need a test From jasonlin at snf.stanford.edu Sun Feb 26 16:52:05 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 26 Feb 2012 16:52:05 -0800 Subject: Problem tel SNF 2012-02-26 16:52:05: Could not run Message-ID: Could not run tool. The wafer sits on the load arm waiting to go into process chamber, but times out. Not sure what causes it to time out, but it seems like the process chamber can't get ready to accept a wafer within the acceptable time.