Problem tel SNF 2012-02-26 16:52:05: Could not run

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Sun Feb 26 16:52:05 PST 2012


Could not run tool. The wafer sits on the load arm waiting to go into process chamber, but times out.  Not sure what causes it to time out, but it seems like the process chamber can't get ready to accept a wafer within the acceptable time.




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