From toru.ito at us.tel.com  Tue Feb  5 07:37:06 2013
From: toru.ito at us.tel.com (toru.ito at us.tel.com)
Date: Tue, 5 Feb 2013 07:37:06 -0800 (PST)
Subject: [tel-pcs] Problem tel SNF 2013-02-05 07:37:06: LL wafer slide out
	error
Message-ID: <23036864.48.1360078626534.JavaMail.coral@snc-coraldb.stanford.edu>

"LL wafer slide out error" occurred when the wafer came back from PM to LL1, and LL-GV was not closed. I tried to close the GV to modify the wafer position but  I could not do that because "no transfer alarm on LL" was shown as NG. All alarms have been cleared.

From tberg at stanford.edu  Wed Feb  6 06:51:45 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 6 Feb 2013 06:51:45 -0800 (PST)
Subject: [tel-pcs] Problem tel SNF 2013-02-05 07:37:06: LL wafer slide
	out error
Message-ID: <5293424.75.1360162305101.JavaMail.coral@snc-coraldb.stanford.edu>

Vented transfer and LL adjusted wafers in LL pumped back down. no 
errors  at this time.

From tberg at stanford.edu  Tue Feb 12 14:28:13 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Tue, 12 Feb 2013 14:28:13 -0800 (PST)
Subject: [tel-pcs] Shutdown tel SNF 2013-02-12 14:28:13: Pumps off process
	cooling
Message-ID: <4171898.57.1360708093966.JavaMail.coral@snc-coraldb.stanford.edu>


From tberg at stanford.edu  Wed Feb 20 07:15:02 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:15:02 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2013-01-10 08:58:09:
Message-ID: <18802909.11.1361373302306.JavaMail.coral@snc-coraldb.stanford.edu>

noted. tool back up after PCW fail

From tberg at stanford.edu  Wed Feb 20 07:15:53 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:15:53 -0800 (PST)
Subject: [tel-pcs] Shutdown tel SNF 2013-02-12 14:28:13: Pumps off
	process cooling
Message-ID: <9275605.12.1361373353418.JavaMail.coral@snc-coraldb.stanford.edu>

noted. tool back up after PCW fail. all pumps back on turbo at speed, 
stage is at 200 c

From tberg at stanford.edu  Wed Feb 20 07:16:28 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:16:28 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2012-12-13 12:22:56: started all
 pumps and turbo
Message-ID: <33174795.13.1361373388499.JavaMail.coral@snc-coraldb.stanford.edu>

all ok now

From tberg at stanford.edu  Wed Feb 20 07:16:49 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:16:49 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2012-12-18 07:35:16: All pumps
 tripped off cooling water fault
Message-ID: <2171130.14.1361373409554.JavaMail.coral@snc-coraldb.stanford.edu>

all ok now

From tberg at stanford.edu  Wed Feb 20 07:17:06 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:17:06 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2012-12-18 07:35:47: reset all pumps
Message-ID: <15755959.15.1361373426600.JavaMail.coral@snc-coraldb.stanford.edu>

all ok now

From tberg at stanford.edu  Wed Feb 20 07:17:28 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:17:28 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2012-12-06 10:34:49: Back in vacuum
 after Jim McVitties work
Message-ID: <156434.16.1361373448656.JavaMail.coral@snc-coraldb.stanford.edu>

noted

From tberg at stanford.edu  Wed Feb 20 07:17:46 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:17:46 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2012-08-20 12:31:34: Restarted turbo
Message-ID: <15025658.17.1361373466705.JavaMail.coral@snc-coraldb.stanford.edu>

noted

From tberg at stanford.edu  Wed Feb 20 07:18:05 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 20 Feb 2013 07:18:05 -0800 (PST)
Subject: [tel-pcs] Comment tel SNF 2012-09-25 07:53:07: badger interlock
 installed and tested
Message-ID: <7608442.18.1361373485754.JavaMail.coral@snc-coraldb.stanford.edu>

completed

From toru.ito at us.tel.com  Tue Feb 26 08:13:04 2013
From: toru.ito at us.tel.com (toru.ito at us.tel.com)
Date: Tue, 26 Feb 2013 08:13:04 -0800 (PST)
Subject: [tel-pcs] Problem tel SNF 2013-02-26 08:13:04: transfer problem
Message-ID: <13745030.42.1361895184847.JavaMail.coral@snc-coraldb.stanford.edu>

wafer does not come back from V-Arm. Seems like the system recognize the alarm "wafer slide out" although the alarm was cleared.