[tel-pcs] Problem tel SNF 2013-02-05 07:37:06: LL wafer slide out error

toru.ito at us.tel.com toru.ito at us.tel.com
Tue Feb 5 07:37:06 PST 2013


"LL wafer slide out error" occurred when the wafer came back from PM to LL1, and LL-GV was not closed. I tried to close the GV to modify the wafer position but  I could not do that because "no transfer alarm on LL" was shown as NG. All alarms have been cleared.


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