[tel-pcs] Problem tel SNF 2013-02-26 08:13:04: transfer problem

toru.ito at us.tel.com toru.ito at us.tel.com
Tue Feb 26 08:13:04 PST 2013


wafer does not come back from V-Arm. Seems like the system recognize the alarm "wafer slide out" although the alarm was cleared.


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