Urgent: Wafer positioning in TEL

gthareja at stanford.edu gthareja at stanford.edu
Wed Aug 13 15:42:06 PDT 2008

Dear users.

please note this.

Make sure (before loading your 4 inch wafer) that both the 12 inch  
wafers in the Load Lock (LL) of TEL-SPA machine are positioned tightly  
to the wall of the load lock .

If they are not, the system would error on you.

If they are not, please take your diff clean tweezer and push both the  
12 inch wafers carefully, so that they touch the wall.

If you have any questions or do not understand my email, please  
contact me in person and I would explain you.

You can reach me at 650-704-1029


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