From gthareja at stanford.edu Wed Mar 4 15:33:05 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Wed, 4 Mar 2009 15:33:05 -0800 (PST) Subject: TEL-SPA users: Please note Message-ID: <1904515534.1432791236209585888.JavaMail.root@zm06.stanford.edu> Dear users please use your face mask when you use TEL-SPA. We see a lot of contamination on the 4 inch cut out 12 inch wafers. Its very hard to clean the dirt/marks. thanks for your patience.