From maurice at snf.stanford.edu  Thu May  5 11:30:00 2005
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 5 May 2005 11:30:00 -0700
Subject: Shutdown teos2 SNF 2005-05-05 11:29:59:  MFS alarm  
Message-ID: <mailman.11.1356283486.4766.teos2-pcs@snf.stanford.edu>

 lo teos flow
set point 60    actual 2.6
aborted run and loaded pump program  
wafers still inside



From tberg at snf.stanford.edu  Thu May  5 13:14:15 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 5 May 2005 13:14:15 -0700
Subject: Comment teos2 SNF 2005-05-05 13:14:11: Replaced TEOS container heating up
Message-ID: <mailman.12.1356283486.4766.teos2-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Thu May  5 14:43:31 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 5 May 2005 14:43:31 -0700
Subject: Comment teos2 SNF 2005-05-05 13:14:11: Replaced TEOS container heating up
Message-ID: <mailman.13.1356283486.4766.teos2-pcs@snf.stanford.edu>

Teos ampule changed



From tberg at snf.stanford.edu  Thu May  5 14:44:05 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 5 May 2005 14:44:05 -0700
Subject: Shutdown teos2 SNF 2005-05-05 11:29:59:  MFS alarm  
Message-ID: <mailman.14.1356283486.4766.teos2-pcs@snf.stanford.edu>

Changed TEOS ampule and heated back up checked flow manually at 60 sccm ok



From mdickey at snf.stanford.edu  Tue May 17 09:34:39 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 17 May 2005 09:34:39 -0700
Subject: Problem teos2 SNF 2005-03-30 06:27:54: Process checking recipes
Message-ID: <mailman.15.1356283486.4766.teos2-pcs@snf.stanford.edu>

ok for now