From panjun at snf.stanford.edu Sat Aug 5 22:43:36 2006 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Sat, 5 Aug 2006 22:43:36 -0700 Subject: Problem teos2 SNF 2006-08-05 22:43:35: Deposition doesn't stay Message-ID: The deposition doesn't stay as long as it should be in the program. Step 75 will jump to step 80 within an indefinite time (sometimess longer-- 1 or 2 hour and sometime shorter-- 10 minutes) before the deposition finishes for no obvious reason. From panjun at snf.stanford.edu Sat Aug 5 22:49:30 2006 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Sat, 5 Aug 2006 22:49:30 -0700 Subject: Problem teos2 SNF 2006-08-05 22:49:30: Revision of previous report Message-ID: It should be " step 70 jumps to step 75", not "step 75 to 80". From mdickey at snf.stanford.edu Mon Aug 7 06:16:35 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 7 Aug 2006 06:16:35 -0700 Subject: Shutdown teos2 SNF 2006-08-07 06:16:34: ampule Message-ID: Down for ampule change From seymour at snf.stanford.edu Mon Aug 7 09:58:25 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Aug 2006 09:58:25 -0700 Subject: Shutdown teos2 SNF 2006-08-07 06:16:34: ampule Message-ID: changed From seymour at snf.stanford.edu Mon Aug 7 10:01:17 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Aug 2006 10:01:17 -0700 Subject: Problem teos2 SNF 2006-08-07 10:01:17: TEOS and N2LO alarms Message-ID: The MFC's zeros are off and cannot be silanced for very long before alarming again. From maurice at snf.stanford.edu Mon Aug 7 17:13:45 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Aug 2006 17:13:45 -0700 Subject: Problem teos2 SNF 2006-08-07 17:13:44: No dep Message-ID: Ran TEOS2VH 00:16:00 with standard flows pressure 1200...normal expected 1000A but there was no dep From tberg at snf.stanford.edu Tue Aug 8 14:02:47 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Aug 2006 14:02:47 -0700 Subject: Problem teos2 SNF 2006-08-07 10:01:17: TEOS and N2LO alarms Message-ID: Replaced N2lo MFC and rezeroed TEOS no alarms since 9:00am From tberg at snf.stanford.edu Tue Aug 8 14:03:21 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Aug 2006 14:03:21 -0700 Subject: Problem teos2 SNF 2006-08-05 22:43:35: Deposition doesn't stay Message-ID: see next comment From maurice at snf.stanford.edu Tue Aug 8 15:01:57 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Aug 2006 15:01:57 -0700 Subject: Shutdown teos2 SNF 2006-08-08 15:01:56: Teos cause burnbox hi Message-ID: Teos cause burnbox pressure high. Poly (step 65 of amor585)and BPSG (step 45 of LTO400) were running. I started Teos and noticed a smell (step 30 of teos2vh program). Ray and I saw that the burnbox pressure was +5. I aborted Teos and burnbox pressure dropped to -1. From maurice at snf.stanford.edu Thu Aug 10 11:12:06 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Aug 2006 11:12:06 -0700 Subject: Problem teos2 SNF 2006-08-07 17:13:44: No dep Message-ID: test good. center 772 ang top 785 bottom 838 left 790 right 799 From maurice at snf.stanford.edu Thu Aug 10 17:11:20 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Aug 2006 17:11:20 -0700 Subject: Shutdown teos2 SNF 2006-08-08 15:01:56: Teos cause burnbox hi Message-ID: logged