Shutdown teos2 SNF 2006-08-08 15:01:56: Teos cause burnbox hi

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Aug 8 15:01:57 PDT 2006


Teos cause burnbox pressure high.
Poly (step 65 of amor585)and BPSG (step 45 of LTO400) were running.  I started Teos and noticed a smell (step 30 of teos2vh program).  Ray and I saw that the burnbox pressure was +5.  I aborted Teos and burnbox pressure dropped to -1.




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