From bongsang at snf.stanford.edu Sun Feb 12 13:39:37 2006 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Sun, 12 Feb 2006 13:39:37 -0800 Subject: Problem teos2 SNF 2006-02-12 13:39:37: teos flow is very low Message-ID: It keeps alarming at deposition step. teos flow rate shows only 1~4. Wafers are still inside the tube, at holding step. From tberg at snf.stanford.edu Mon Feb 13 07:52:42 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Feb 2006 07:52:42 -0800 Subject: Problem teos2 SNF 2006-02-12 13:39:37: teos flow is very low Message-ID: REplaced TEOS ampule-heating up From mdickey at snf.stanford.edu Wed Feb 15 06:51:30 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 15 Feb 2006 06:51:30 -0800 Subject: Shutdown teos2 SNF 2006-02-15 06:51:30: ampule Message-ID: down for ampule change From mdickey at snf.stanford.edu Wed Feb 15 07:36:30 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 15 Feb 2006 07:36:30 -0800 Subject: Shutdown teos2 SNF 2006-02-15 06:51:30: ampule Message-ID: Ampule is changed. Tube is ready when ampule comes up to temp. From maurice at snf.stanford.edu Fri Feb 17 08:12:14 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2006 08:12:14 -0800 Subject: Shutdown teos2 SNF 2006-02-17 08:12:13: Teos tank empty Message-ID: From seymour at snf.stanford.edu Fri Feb 17 11:39:52 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2006 11:39:52 -0800 Subject: Shutdown teos2 SNF 2006-02-17 08:12:13: Teos tank empty Message-ID: replaced TEOS and brought up to temp. From maurice at snf.stanford.edu Fri Feb 17 17:20:04 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2006 17:20:04 -0800 Subject: Problem teos2 SNF 2006-02-17 17:20:03: Teos source is low Message-ID: Keep depositions short (less than 2500ang). We are currently using our last tank of Teos. It will last less than 3 micron of deposition. We don't expect another tank for 2 weeks. From king at snf.stanford.edu Wed Feb 22 01:25:37 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 22 Feb 2006 01:25:37 -0800 Subject: Comment teos2 SNF 2006-02-22 01:25:36: TEOS- particles in tube Message-ID: from the thick depositions. The dummy wafers need to be cleaned before getting thick. thanks From maurice at snf.stanford.edu Tue Feb 28 10:05:19 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Feb 2006 10:05:19 -0800 Subject: Problem teos2 SNF 2006-02-17 17:20:03: Teos source is low Message-ID: We have 3 canisters in stock From maurice at snf.stanford.edu Tue Feb 28 10:06:00 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Feb 2006 10:06:00 -0800 Subject: Comment teos2 SNF 2006-02-22 01:25:36: TEOS- particles in tube Message-ID: New dummies have been set out for the tube. From maurice at snf.stanford.edu Tue Feb 28 10:06:21 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Feb 2006 10:06:21 -0800 Subject: Comment teos2 SNF 2006-01-13 15:25:37: TEOS2 dep rate Message-ID: logged From tberg at snf.stanford.edu Tue Feb 28 11:08:29 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Feb 2006 11:08:29 -0800 Subject: Shutdown teos2 SNF 2006-02-28 11:08:28: Message-ID: From tberg at snf.stanford.edu Tue Feb 28 11:08:50 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Feb 2006 11:08:50 -0800 Subject: Shutdown teos2 SNF 2006-02-28 11:08:50: Will not oump down Message-ID: From tberg at snf.stanford.edu Tue Feb 28 12:41:28 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Feb 2006 12:41:28 -0800 Subject: Shutdown teos2 SNF 2006-02-28 11:08:28: Message-ID: From tberg at snf.stanford.edu Tue Feb 28 12:41:56 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Feb 2006 12:41:56 -0800 Subject: Shutdown teos2 SNF 2006-02-28 11:08:50: Will not oump down Message-ID: REpaired broken interlock connectors