From king at snf.stanford.edu Wed Jan 4 17:55:49 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 4 Jan 2006 17:55:49 -0800 Subject: Shutdown teos2 SNF 2006-01-04 17:55:48: TEOS2 Shutdown Message-ID: Tube was found vented, and the front section has a thick layer that looks similar to snow cone ice. Pump appears to be off. Getting "MFS Manual" error. Shutdown per Maurice. From mdickey at snf.stanford.edu Thu Jan 5 07:12:34 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Jan 2006 07:12:34 -0800 Subject: Shutdown teos2 SNF 2006-01-04 17:55:48: TEOS2 Shutdown Message-ID: Vacuumed up loose particles From king at snf.stanford.edu Fri Jan 6 12:47:14 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 6 Jan 2006 12:47:14 -0800 Subject: Shutdown teos2 SNF 2006-01-06 12:47:14: TEOS2 shutdown Message-ID: O2 MFC not responding correctly- doesn't come on, then doesn't shut off completely. Abort and shutdown per Ray. This is may be why the tube was so dirty. (not clean enough for device wafers). Thanks. From tberg at snf.stanford.edu Fri Jan 6 13:55:55 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Jan 2006 13:55:55 -0800 Subject: Comment teos2 SNF 2006-01-06 13:55:54: O2 mfc removed for repair Message-ID: From tberg at snf.stanford.edu Mon Jan 9 06:42:10 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jan 2006 06:42:10 -0800 Subject: Comment teos2 SNF 2006-01-09 06:42:10: Tube pull while MFC is out Message-ID: From mdickey at snf.stanford.edu Wed Jan 11 08:43:16 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 11 Jan 2006 08:43:16 -0800 Subject: Comment teos2 SNF 2006-01-09 06:42:10: Tube pull while MFC is out Message-ID: Tube has been pulled and cleaned. Currently heating up for test From maurice at snf.stanford.edu Wed Jan 11 11:28:11 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 11 Jan 2006 11:28:11 -0800 Subject: Problem teos2 SNF 2006-01-11 11:28:11: MFS alarm O2 Message-ID: During pump program, O2 MFC shows flow of 24.2 From tberg at snf.stanford.edu Wed Jan 11 12:55:35 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 12:55:35 -0800 Subject: Problem teos2 SNF 2006-01-11 11:28:11: MFS alarm O2 Message-ID: Adjusted Zero and monitored From tberg at snf.stanford.edu Wed Jan 11 12:55:54 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 12:55:54 -0800 Subject: Comment teos2 SNF 2006-01-06 13:55:54: O2 mfc removed for repair Message-ID: Repaired and reinstalled From tberg at snf.stanford.edu Wed Jan 11 12:56:17 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 12:56:17 -0800 Subject: Problem teos2 SNF 2005-11-23 10:14:54: TEOS tube MFC is alarming Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 12:56:34 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 12:56:34 -0800 Subject: Comment teos2 SNF 2005-11-22 14:22:21: MFS alarm Message-ID: noted From maurice at snf.stanford.edu Thu Jan 12 14:51:10 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Jan 2006 14:51:10 -0800 Subject: Shutdown teos2 SNF 2006-01-06 12:47:14: TEOS2 shutdown Message-ID: Teos2 test ok From king at snf.stanford.edu Fri Jan 13 15:25:38 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 13 Jan 2006 15:25:38 -0800 Subject: Comment teos2 SNF 2006-01-13 15:25:37: TEOS2 dep rate Message-ID: Maurice coated the tube but the dep rate was quite low. I'm coating it again and will run another test after that. From king at snf.stanford.edu Fri Jan 13 23:53:11 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 13 Jan 2006 23:53:11 -0800 Subject: Problem teos2 SNF 2006-01-13 23:53:09: Heat kicked off Message-ID: Trying to coat the tube- previous run just unloads w/o dep (pump fail?) and on the last run the heat died. It still registers about 625C on the front panel and on Tycom (with ?marks), but is almost dead cold. From king at snf.stanford.edu Mon Jan 16 15:55:44 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 16 Jan 2006 15:55:44 -0800 Subject: Shutdown teos2 SNF 2006-01-16 15:55:43: TEOS2 no heat, I/O error Message-ID: Suspected contactor problem. From tberg at snf.stanford.edu Wed Jan 18 13:10:27 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 Jan 2006 13:10:27 -0800 Subject: Shutdown teos2 SNF 2006-01-16 15:55:43: TEOS2 no heat, I/O error Message-ID: Replaced 4 fuses reset element breakers From king at snf.stanford.edu Thu Jan 19 16:48:17 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 19 Jan 2006 16:48:17 -0800 Subject: Shutdown teos2 SNF 2006-01-19 16:48:16: TEOS shutdown Message-ID: The endpiece is catching on a metal flange while loading and unloading which torques the endpiece out of square. Not safe to run like this. It's not seating properly and not pumping down in Pump7 so will have to leave vented for maintenance. Shutdown per Maurice. It's apparently done this before; there's not much clearance. Thanks for your help. From king at snf.stanford.edu Thu Jan 19 16:55:25 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 19 Jan 2006 16:55:25 -0800 Subject: Shutdown teos2 SNF 2006-01-19 16:55:25: TEOS2 shutdown Message-ID: The endpiece is getting caught on a metal flange which prevents it from opening/closing and torques it out of position. Now it can't pump down. The clearances are so tight on this; apparently it's done it before. Shutdown per Maurice and thanks all for your help. From tberg at snf.stanford.edu Fri Jan 20 08:07:54 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Jan 2006 08:07:54 -0800 Subject: Problem teos2 SNF 2006-01-13 23:53:09: Heat kicked off Message-ID: replaced blown fuses From mdickey at snf.stanford.edu Fri Jan 20 08:57:52 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Jan 2006 08:57:52 -0800 Subject: Shutdown teos2 SNF 2006-01-19 16:55:25: TEOS2 shutdown Message-ID: Door adjusted//.....back in pump program From mdickey at snf.stanford.edu Fri Jan 20 08:58:05 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Jan 2006 08:58:05 -0800 Subject: Shutdown teos2 SNF 2006-01-19 16:48:16: TEOS shutdown Message-ID: noted From king at snf.stanford.edu Fri Jan 20 14:41:08 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 20 Jan 2006 14:41:08 -0800 Subject: Problem teos2 SNF 2006-01-20 14:41:07: TEOS2 Alarm Message-ID: Unsure why. It happened when the boat was loading although the boat interlock is met. Could we please have this looked at so we can work through the weekend? Thanks. From king at snf.stanford.edu Mon Jan 23 16:31:59 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 23 Jan 2006 16:31:59 -0800 Subject: Comment teos2 SNF 2006-01-23 16:31:58: TEOS2 alarm cleared; door is a concern Message-ID: By Saturday the unknown alarm on Friday had cleared itself. Eric P checked the tube as best as possible for me. It has been pumped down since Saturday. The door assembly is still a concern. From king at snf.stanford.edu Mon Jan 23 20:24:44 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 23 Jan 2006 20:24:44 -0800 Subject: Shutdown teos2 SNF 2006-01-23 20:24:43: TEOS2 Won't pump down Message-ID: From mdickey at snf.stanford.edu Tue Jan 24 14:50:10 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 24 Jan 2006 14:50:10 -0800 Subject: Shutdown teos2 SNF 2006-01-23 20:24:43: TEOS2 Won't pump down Message-ID: Adjusted door and checked pump down 3 times. Please observe future operations From mdickey at snf.stanford.edu Tue Jan 24 14:50:30 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 24 Jan 2006 14:50:30 -0800 Subject: Comment teos2 SNF 2006-01-23 16:31:58: TEOS2 alarm cleared; door is a concern Message-ID: noted From mdickey at snf.stanford.edu Tue Jan 24 14:50:48 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 24 Jan 2006 14:50:48 -0800 Subject: Problem teos2 SNF 2006-01-20 14:41:07: TEOS2 Alarm Message-ID: Door adjusted From king at snf.stanford.edu Wed Jan 25 22:22:46 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 25 Jan 2006 22:22:46 -0800 Subject: Problem teos2 SNF 2006-01-25 22:22:45: TEOS alarm, fails to pump Message-ID: MFS alarm during initial pump steps. Display in back reads "O2 BNTLCK." Restarted three times, no luck. Tube is vented. From mdickey at snf.stanford.edu Thu Jan 26 07:16:21 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 26 Jan 2006 07:16:21 -0800 Subject: Problem teos2 SNF 2006-01-25 22:22:45: TEOS alarm, fails to pump Message-ID: Tweeked the door and tested pump down and venting twice with no problems. Leaving status in yellow for observation