Shutdown teos2 SNF 2006-01-06 12:47:14: TEOS2 shutdown

king at snf.stanford.edu king at snf.stanford.edu
Fri Jan 6 12:47:14 PST 2006


O2 MFC not responding correctly- doesn't come on, then doesn't shut off completely.  Abort and shutdown per Ray.  This is may be why the tube was so dirty. (not clean enough for device wafers).  Thanks.




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