Shutdown teos2 SNF 2006-01-06 12:47:14: TEOS2 shutdown

king at king at
Fri Jan 6 12:47:14 PST 2006

O2 MFC not responding correctly- doesn't come on, then doesn't shut off completely.  Abort and shutdown per Ray.  This is may be why the tube was so dirty. (not clean enough for device wafers).  Thanks.

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