From tberg at snf.stanford.edu Mon Jun 5 06:48:04 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Jun 2006 06:48:04 -0700 Subject: Comment teos2 SNF 2006-06-05 06:48:03: Needs test Message-ID: Tube reassembled and leak checked needs test From maurice at snf.stanford.edu Mon Jun 5 16:05:37 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 5 Jun 2006 16:05:37 -0700 Subject: Comment teos2 SNF 2006-06-05 06:48:03: Needs test Message-ID: Dep rate normal test complete 00:16:00 ~1000Ang From maurice at snf.stanford.edu Mon Jun 5 16:06:06 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 5 Jun 2006 16:06:06 -0700 Subject: Shutdown teos2 SNF 2006-05-26 15:21:10: problem Message-ID: door adjusted tube pulled and cleaned From junil at snf.stanford.edu Mon Jun 5 20:45:21 2006 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Mon, 5 Jun 2006 20:45:21 -0700 Subject: Problem teos2 SNF 2006-06-05 20:45:20: Process has aborted Message-ID: Process has aborted at event # 40. Abort recipe has been run. It appears to me that ABOVE ATM light should have been turned off but....... From tberg at snf.stanford.edu Tue Jun 6 07:12:02 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Jun 2006 07:12:02 -0700 Subject: Comment teos2 SNF 2006-06-06 07:12:02: System in pump program Message-ID: Put in pump program in step 25 monitoring. From rmelamud at snf.stanford.edu Tue Jun 13 18:13:59 2006 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Tue, 13 Jun 2006 18:13:59 -0700 Subject: Problem teos2 SNF 2006-06-13 18:13:58: tube cleaning / replacing dummy wafers Message-ID: Seems that the film on the dummy wafers cracked during deposition and left many particle specs on the boats. Can this be cleaned off tomorrow (wen) morning please? Thanks! Renata From tberg at snf.stanford.edu Thu Jun 15 06:33:11 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Jun 2006 06:33:11 -0700 Subject: Problem teos2 SNF 2006-06-13 18:13:58: tube cleaning / replacing dummy wafers Message-ID: Replaced boats From tberg at snf.stanford.edu Thu Jun 15 06:33:33 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Jun 2006 06:33:33 -0700 Subject: Comment teos2 SNF 2006-06-06 07:12:02: System in pump program Message-ID: noted From mdickey at snf.stanford.edu Thu Jun 15 06:54:23 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jun 2006 06:54:23 -0700 Subject: Shutdown teos2 SNF 2006-06-15 06:54:19: Source Message-ID: Down for ampule change From mdickey at snf.stanford.edu Thu Jun 15 10:07:35 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jun 2006 10:07:35 -0700 Subject: Comment teos2 SNF 2006-06-15 10:07:35: Door Message-ID: Working on door problem From mdickey at snf.stanford.edu Thu Jun 15 14:20:48 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Jun 2006 14:20:48 -0700 Subject: Comment teos2 SNF 2006-06-15 14:20:44: Heating up Message-ID: Found leak at the ultra-torre fitting on the teos line. When temp stabilizes, tube ready for use From maurice at snf.stanford.edu Thu Jun 15 16:39:34 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Jun 2006 16:39:34 -0700 Subject: Comment teos2 SNF 2006-06-15 14:20:44: Heating up Message-ID: At temp From maurice at snf.stanford.edu Thu Jun 15 16:39:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Jun 2006 16:39:50 -0700 Subject: Shutdown teos2 SNF 2006-06-15 06:54:19: Source Message-ID: Source change complete From maurice at snf.stanford.edu Thu Jun 15 16:40:14 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Jun 2006 16:40:14 -0700 Subject: Problem teos2 SNF 2006-06-05 20:45:20: Process has aborted Message-ID: door adjusted From kupnik at snf.stanford.edu Tue Jun 20 18:01:07 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Tue, 20 Jun 2006 18:01:07 -0700 Subject: Problem teos2 SNF 2006-06-20 18:01:07: pressure limit exceeded during step 70 Message-ID: we tried it twice, it always happened after 45 minutes and after the last step the boat did not come out automatically leak check (step 40 and 45) was always okay, but then the pressure value during deposition (step 70) increased slowly from 1207 to more than 1900. From mdickey at snf.stanford.edu Wed Jun 21 07:26:32 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Jun 2006 07:26:32 -0700 Subject: Comment teos2 SNF 2006-06-21 07:26:31: Pressure control Message-ID: Made an adjustment to the MKS pressure controller. Check flows and they were good. Will keep tube under observation From kupnik at snf.stanford.edu Wed Jun 21 17:15:31 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Wed, 21 Jun 2006 17:15:31 -0700 Subject: Problem teos2 SNF 2006-06-21 17:15:31: deposition stopped again Message-ID: I made a test run this afternoon with a deposition time of 3 hours. The deposition step stopped again. However, this time it stopped after about 1.5 hours. Yesterday it always stopped after 45 minutes, we tried it twice. It seems the tube can not keep the pressure in the right range for a longer deposition run. Please, do another readjustment of the pressure gauge (if possible) and instead of only a 5 minutes test this time please a 3 hours test. Maybe I can process my wafers then on Thursday afternoon. Thanks Mario From maurice at snf.stanford.edu Mon Jun 26 14:53:14 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jun 2006 14:53:14 -0700 Subject: Problem teos2 SNF 2006-06-21 17:15:31: deposition stopped again Message-ID: build up in neck of tube removed From maurice at snf.stanford.edu Mon Jun 26 14:53:26 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jun 2006 14:53:26 -0700 Subject: Comment teos2 SNF 2006-06-21 07:26:31: Pressure control Message-ID: logged From maurice at snf.stanford.edu Mon Jun 26 14:53:47 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jun 2006 14:53:47 -0700 Subject: Problem teos2 SNF 2006-06-20 18:01:07: pressure limit exceeded during step 70 Message-ID: build up in neck of tube removed From maurice at snf.stanford.edu Mon Jun 26 14:54:47 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Jun 2006 14:54:47 -0700 Subject: Comment teos2 SNF 2006-06-15 10:07:35: Door Message-ID: adjusted Mike removed rails in scavenger