From aeonia at snf.stanford.edu Mon May 1 11:37:07 2006 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Mon, 1 May 2006 11:37:07 -0700 Subject: Problem teos2 SNF 2006-05-01 11:37:07: Several problems Message-ID: 1. Like Saurabh said, with pump7 program, it doesn't stay at hold stage. It just go to end stage. 2. when I ran teos2vh, there were MFS alarming. 3. I set the deposition time 3hrs, but it only went about 1 hr. When I came to check the deposition pressure, it was in step 115. I checked deposition pressure and other flows when deposition started and it looked OK at that time. From mdickey at snf.stanford.edu Mon May 1 14:08:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 1 May 2006 14:08:54 -0700 Subject: Shutdown teos2 SNF 2006-05-01 14:08:53: Pump problem Message-ID: Investigating pumpdown problem From mdickey at snf.stanford.edu Fri May 12 13:49:09 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 12 May 2006 13:49:09 -0700 Subject: Shutdown teos2 SNF 2006-05-01 14:08:53: Pump problem Message-ID: Pumps rebuilt....system needs a test From maurice at snf.stanford.edu Fri May 12 13:57:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 May 2006 13:57:01 -0700 Subject: Comment teos2 SNF 2006-05-12 13:56:57: testing after pump replaced Message-ID: From maurice at snf.stanford.edu Fri May 12 13:57:34 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 May 2006 13:57:34 -0700 Subject: Problem teos2 SNF 2006-05-01 11:37:07: Several problems Message-ID: pump replaced From maurice at snf.stanford.edu Fri May 12 13:57:47 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 May 2006 13:57:47 -0700 Subject: Problem teos2 SNF 2006-04-25 15:48:27: Pump 7 program keeps dropping out of hold. Message-ID: pump replaced From maurice at snf.stanford.edu Fri May 12 17:34:39 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 May 2006 17:34:39 -0700 Subject: Shutdown teos2 SNF 2006-05-12 17:34:39: gate valve not opening Message-ID: fails leak check soft pump open but not gate valve From mdickey at snf.stanford.edu Mon May 15 07:55:39 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 15 May 2006 07:55:39 -0700 Subject: Shutdown teos2 SNF 2006-05-12 17:34:39: gate valve not opening Message-ID: Fixed slow pump air line leak. Back in pump program From mdickey at snf.stanford.edu Mon May 15 09:42:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 15 May 2006 09:42:54 -0700 Subject: Shutdown teos2 SNF 2006-05-15 09:42:53: pump Message-ID: Working on pumpdown problem From mdickey at snf.stanford.edu Mon May 15 13:46:12 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 15 May 2006 13:46:12 -0700 Subject: Comment teos2 SNF 2006-05-15 13:46:12: Test Message-ID: System is ready for test after replacing bellows and o rings From maurice at snf.stanford.edu Mon May 15 17:09:47 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 15 May 2006 17:09:47 -0700 Subject: Comment teos2 SNF 2006-05-15 13:46:12: Test Message-ID: teos2vh 00:16:00 expected 810 ang ~900 actual tool up From maurice at snf.stanford.edu Mon May 15 17:09:59 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 15 May 2006 17:09:59 -0700 Subject: Shutdown teos2 SNF 2006-05-15 09:42:53: pump Message-ID: pump replaced From maurice at snf.stanford.edu Mon May 15 17:10:14 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 15 May 2006 17:10:14 -0700 Subject: Comment teos2 SNF 2006-05-12 13:56:57: testing after pump replaced Message-ID: test good From rmelamud at snf.stanford.edu Mon May 15 18:38:17 2006 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Mon, 15 May 2006 18:38:17 -0700 Subject: Problem teos2 SNF 2006-05-15 18:38:17: teos2 not pumping down Message-ID: PUMP7 doesn't reach pumped state. Fails as recipe goes into leak check step (15) and skips to the end. Wafers are inside. Please let me know if they need to be taken out. Thanks! From rmelamud at snf.stanford.edu Mon May 15 19:59:05 2006 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Mon, 15 May 2006 19:59:05 -0700 Subject: Shutdown teos2 SNF 2006-05-15 19:59:05: Message-ID: From maurice at snf.stanford.edu Thu May 18 15:34:44 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 May 2006 15:34:44 -0700 Subject: Shutdown teos2 SNF 2006-05-15 19:59:05: Message-ID: From maurice at snf.stanford.edu Thu May 18 15:34:58 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 May 2006 15:34:58 -0700 Subject: Problem teos2 SNF 2006-05-15 18:38:17: teos2 not pumping down Message-ID: tube replaced From maurice at snf.stanford.edu Thu May 18 15:36:03 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 May 2006 15:36:03 -0700 Subject: Comment teos2 SNF 2006-05-18 15:36:03: Teos2 test good Message-ID: teos2vh 00:27:00 expected 850 actual 868 From aeonia at snf.stanford.edu Sat May 20 14:56:29 2006 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Sat, 20 May 2006 14:56:29 -0700 Subject: Problem teos2 SNF 2006-05-20 14:56:28: pump problem again Message-ID: 1. deposition step was skipped in teos2vh. 2. pump7 goes to the end step without hold. From tberg at snf.stanford.edu Mon May 22 07:47:28 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 May 2006 07:47:28 -0700 Subject: Shutdown teos2 SNF 2006-05-22 07:47:28: shutdown foe water and air tie ins Message-ID: From tberg at snf.stanford.edu Mon May 22 09:06:29 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 May 2006 09:06:29 -0700 Subject: Shutdown teos2 SNF 2006-05-22 07:47:28: shutdown foe water and air tie ins Message-ID: tie in completed From mdickey at snf.stanford.edu Mon May 22 09:37:42 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 May 2006 09:37:42 -0700 Subject: Comment teos2 SNF 2006-05-22 09:37:41: Source Message-ID: Ampule needs to be changed. Cooling off now. When changed should be ready for use From aeonia at snf.stanford.edu Tue May 23 02:44:33 2006 From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu) Date: Tue, 23 May 2006 02:44:33 -0700 Subject: Problem teos2 SNF 2006-05-23 02:44:32: leak check failure Message-ID: it failed leak check 4 times. From maurice at snf.stanford.edu Thu May 25 17:22:52 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 May 2006 17:22:52 -0700 Subject: Problem teos2 SNF 2006-05-23 02:44:32: leak check failure Message-ID: make sure door closes... it should pass From maurice at snf.stanford.edu Thu May 25 17:23:02 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 May 2006 17:23:02 -0700 Subject: Comment teos2 SNF 2006-05-22 09:37:41: Source Message-ID: replaced From maurice at snf.stanford.edu Thu May 25 17:23:38 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 May 2006 17:23:38 -0700 Subject: Problem teos2 SNF 2006-05-20 14:56:28: pump problem again Message-ID: Door may need a firm push. From maurice at snf.stanford.edu Thu May 25 17:24:05 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 May 2006 17:24:05 -0700 Subject: Comment teos2 SNF 2006-05-18 15:36:03: Teos2 test good Message-ID: logged From vipin at snf.stanford.edu Fri May 26 15:21:11 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 26 May 2006 15:21:11 -0700 Subject: Shutdown teos2 SNF 2006-05-26 15:21:10: problem Message-ID: Door does not close