Problem teos2 SNF 2006-05-01 11:37:07: Several problems

aeonia at snf.stanford.edu aeonia at snf.stanford.edu
Mon May 1 11:37:07 PDT 2006


1. Like Saurabh said, with pump7 program, it doesn't stay at hold stage. It just go to end stage.
2. when I ran teos2vh, there were MFS alarming.
3. I set the deposition time 3hrs, but it only went about 1 hr. When I came to check the deposition pressure, it was in step 115. I checked deposition pressure and other flows when deposition started and it looked OK at that time. 




More information about the teos2-pcs mailing list