Problem teos2 SNF 2006-05-15 18:38:17: teos2 not pumping down

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Mon May 15 18:38:17 PDT 2006


PUMP7 doesn't reach pumped state. Fails as recipe goes into leak check step (15) and skips to the end. Wafers are inside. Please let me know if they need to be taken out. Thanks!




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