Shutdown teos2 SNF 2006-11-20 13:26:50: process low
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Nov 20 13:26:51 PST 2006
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Shutdown teos2 SNF 2006-11-20 13:26:50: process low
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should 1200, but is reading 500- 700mtorr
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Shutdown teos2 SNF 2006-11-20 13:26:50: process low
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