From rissman at snf.stanford.edu  Fri Apr  6 09:23:20 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Fri, 6 Apr 2007 09:23:20 -0700
Subject: Comment teos2 SNF 2007-03-08 10:58:49: Test
Message-ID: <mailman.185.1356283487.4766.teos2-pcs@snf.stanford.edu>

dep rate normal



From maurice at snf.stanford.edu  Mon Apr  9 09:29:33 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 9 Apr 2007 09:29:33 -0700
Subject: Comment teos2 SNF 2007-03-07 21:16:13: Oxide thickness is normal
Message-ID: <mailman.186.1356283487.4766.teos2-pcs@snf.stanford.edu>

logged



From maurice at snf.stanford.edu  Mon Apr  9 09:29:40 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 9 Apr 2007 09:29:40 -0700
Subject: Problem teos2 SNF 2007-03-07 17:23:27: unstable pressure during deposition
Message-ID: <mailman.187.1356283487.4766.teos2-pcs@snf.stanford.edu>

logged



From grahamab at snf.stanford.edu  Sat Apr 21 04:21:45 2007
From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu)
Date: Sat, 21 Apr 2007 04:21:45 -0700
Subject: Problem teos2 SNF 2007-04-21 04:21:42: not pumping down
Message-ID: <mailman.188.1356283487.4766.teos2-pcs@snf.stanford.edu>

pump program continually kicks out when it doesn't reach low pressure and goes to "end" state.



From mmessana at snf.stanford.edu  Sat Apr 21 10:24:27 2007
From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu)
Date: Sat, 21 Apr 2007 10:24:27 -0700
Subject: Problem teos2 SNF 2007-04-21 10:24:27: More Pump Information
Message-ID: <mailman.189.1356283487.4766.teos2-pcs@snf.stanford.edu>

It seems that when the N2LO turns on, the system alarms. Not sure if it alarms due to overpressure or flow problem. Also grahamab noticed Air Products delivery at 3:30am this morning. When he arrived this morning, the system was alarming.



From grahamab at snf.stanford.edu  Sat Apr 21 10:33:42 2007
From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu)
Date: Sat, 21 Apr 2007 10:33:42 -0700
Subject: Shutdown teos2 SNF 2007-04-21 10:33:41: pump program not working
Message-ID: <mailman.190.1356283487.4766.teos2-pcs@snf.stanford.edu>

see previous comments...



From tberg at snf.stanford.edu  Mon Apr 23 06:36:29 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 23 Apr 2007 06:36:29 -0700
Subject: Comment teos2 SNF 2007-04-23 06:36:29: Ampule change
Message-ID: <mailman.191.1356283487.4766.teos2-pcs@snf.stanford.edu>