Shutdown teos2 SNF 2007-08-23 08:47:57: Teos2 not depositing. WAFERS ARE INSIDE!

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Thu Aug 23 08:48:04 PDT 2007


Deposition aborts ~1hr into step. Please let me know if wafers need to be removed. Thanks!




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