Comment teos2 SNF 2007-08-23 12:04:46: Teos test 8/23/08

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Aug 23 12:04:47 PDT 2007


The base and leak check were good.  The initial deposition looked good (gas flows and pressure).
15 minutes into the dep the pressure had risen from the 1200mtorr set point up to 1370 (gas flows ok).
After 18 minutes pressure up to 1618 (gas flows ok).
After ~24 minutes the pressure reached 2000 mtorr and the run aborted.




More information about the teos2-pcs mailing list