Shutdown teos2 SNF 2007-08-23 08:47:57: Teos2 not depositing. WAFERS ARE INSIDE!

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 24 14:45:28 PDT 2007


Pressure rising during deposition and then aborting once pressure reaches 2000mtorr.
Ted baked out "abatement trap".  He also created TEOS2VH2.  This program turns on the abatement system during the purge/temp stabilization step of the program (step before deposition).  This may bake the trap before the dep step and minimize some of the outgasing in the trap that is causing the pressure to rise. 




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