Problem teos2 SNF 2007-12-07 03:18:18: test wafers evaporated

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Fri Dec 7 03:18:19 PST 2007


The test wafers loaded closest to the door seemed to have evaporated some of their coating, depositing flakes on the adjacent wafer.




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