From maurice at snf.stanford.edu Mon Jun 4 11:04:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jun 2007 11:04:59 -0700 Subject: Shutdown teos2 SNF 2007-06-04 11:04:59: No Teos flow Message-ID: Sanjah and mislam report that there was no teos flow on Sanja's run on Sat. From mdickey at snf.stanford.edu Mon Jun 4 13:30:57 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 4 Jun 2007 13:30:57 -0700 Subject: Shutdown teos2 SNF 2007-06-04 11:04:59: No Teos flow Message-ID: cleaned contacts on MFC circuit board. Ran for 30 minutes of deposition with no problems From grahamab at snf.stanford.edu Wed Jun 6 12:20:43 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 6 Jun 2007 12:20:43 -0700 Subject: Shutdown teos2 SNF 2007-06-06 12:20:42: increasing pressure Message-ID: I watched the pressure during deposition and after a little while it slowly started increasing. It was fine for a while but then it steadily increased from 1200 to ~2000 over a period of 5-10 minutes before kicking out and going to the next step. From tberg at snf.stanford.edu Wed Jun 6 13:55:24 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Jun 2007 13:55:24 -0700 Subject: Comment teos2 SNF 2007-06-06 13:55:23: Checking out pressure excursions Message-ID: From tberg at snf.stanford.edu Tue Jun 12 13:14:27 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 12 Jun 2007 13:14:27 -0700 Subject: Comment teos2 SNF 2007-06-12 13:14:27: Rebuilt trap and out gassed for 1,5 hrs Message-ID: From mdickey at snf.stanford.edu Wed Jun 13 08:21:47 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:21:47 -0700 Subject: Comment teos2 SNF 2007-06-12 13:14:27: Rebuilt trap and out gassed for 1,5 hrs Message-ID: noted From mdickey at snf.stanford.edu Wed Jun 13 08:22:11 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:22:11 -0700 Subject: Comment teos2 SNF 2007-06-06 13:55:23: Checking out pressure excursions Message-ID: cleaned trap From mdickey at snf.stanford.edu Wed Jun 13 08:22:39 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:22:39 -0700 Subject: Shutdown teos2 SNF 2007-06-06 12:20:42: increasing pressure Message-ID: Ran teos2vh with no pressure problems. ready for use From mdickey at snf.stanford.edu Wed Jun 13 08:22:46 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:22:46 -0700 Subject: Problem teos2 SNF 2007-05-31 14:45:36: Dep aborted by itself Message-ID: noted From mdickey at snf.stanford.edu Wed Jun 13 08:22:53 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:22:53 -0700 Subject: Comment teos2 SNF 2007-05-31 00:25:55: dep. rate OK Message-ID: noted From mdickey at snf.stanford.edu Wed Jun 13 08:23:06 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:23:06 -0700 Subject: Comment teos2 SNF 2007-05-30 13:38:38: Testing Message-ID: test done From mdickey at snf.stanford.edu Wed Jun 13 08:23:28 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 08:23:28 -0700 Subject: Problem teos2 SNF 2007-05-29 14:37:51: High pressure Message-ID: no more pressure problems From sanjah at snf.stanford.edu Thu Jun 14 13:59:28 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Thu, 14 Jun 2007 13:59:28 -0700 Subject: Shutdown teos2 SNF 2007-06-14 13:59:27: Interrupted deposition, boat came out on it's own Message-ID: From tberg at snf.stanford.edu Fri Jun 15 06:29:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 15 Jun 2007 06:29:00 -0700 Subject: Shutdown teos2 SNF 2007-06-14 13:59:27: Interrupted deposition, boat came out on it's own Message-ID: ran entire dep cycle no problem From maurice at snf.stanford.edu Fri Jun 15 11:27:01 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 15 Jun 2007 11:27:01 -0700 Subject: Comment teos2 SNF 2007-06-15 11:27:01: running test Message-ID: Hey Ted, Mike and Ray, Can you guys help me watch this. Maybe with 4 sets of eyes we catch something (asking one person to watch for 3 hours is too painful). 3 hour dep to watch pressure and Teos flow. From maurice at snf.stanford.edu Fri Jun 15 17:22:39 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 15 Jun 2007 17:22:39 -0700 Subject: Comment teos2 SNF 2007-06-15 11:27:01: running test Message-ID: Ran 3 hour Teos dep (thanks Mike and Ted). Pressure and Teos flow ok during entire run. From grahamab at snf.stanford.edu Sat Jun 16 10:54:48 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 16 Jun 2007 10:54:48 -0700 Subject: Shutdown teos2 SNF 2007-06-16 10:54:47: TEOS flow in all steps Message-ID: teos flowing at 60 in all steps. Tube was at step 115 (hold step) when I got here and after hitting alarm ack to vent, it never boated out. After checking the computer, tube is flowing teos even when not calling for any (reads 60 on controller in maintenance area as well). I loaded the pump program and it pumps down, but teos is still flowing. From tberg at snf.stanford.edu Mon Jun 18 06:35:36 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2007 06:35:36 -0700 Subject: Shutdown teos2 SNF 2007-06-16 10:54:47: TEOS flow in all steps Message-ID: REset MFC checked flows From tberg at snf.stanford.edu Mon Jun 18 13:12:11 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2007 13:12:11 -0700 Subject: Comment teos2 SNF 2007-06-18 13:12:11: TEOS Flow Message-ID: Checked MFC flow it was OK valve after MFC was off there was no actual flow From mdickey at snf.stanford.edu Wed Jun 20 08:34:46 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 20 Jun 2007 08:34:46 -0700 Subject: Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change Message-ID: Down for teos ampule change From mdickey at snf.stanford.edu Wed Jun 20 09:47:10 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 20 Jun 2007 09:47:10 -0700 Subject: Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change Message-ID: Ampule changed and heating up. Next user will do a test From seymour at snf.stanford.edu Fri Jun 22 07:50:39 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 22 Jun 2007 07:50:39 -0700 Subject: Problem teos2 SNF 2007-05-27 15:30:52: deposition stopping early Message-ID: Cleaned trap From panjun at snf.stanford.edu Sun Jun 24 19:40:45 2007 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Sun, 24 Jun 2007 19:40:45 -0700 Subject: Problem teos2 SNF 2007-06-24 19:40:44: mfs alarm, no deposition Message-ID: From mdickey at snf.stanford.edu Mon Jun 25 08:05:49 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 25 Jun 2007 08:05:49 -0700 Subject: Comment teos2 SNF 2007-06-25 08:05:49: Test Message-ID: Ran a 10 minute deposition test with no problems. From maurice at snf.stanford.edu Mon Jun 25 17:27:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Jun 2007 17:27:49 -0700 Subject: Shutdown teos2 SNF 2007-06-25 17:27:48: Pressure went to 2000/aborted Message-ID: Panjun and I watched the pressure climb to 2000mtorr within the first 10min of his deposition. The program jumped to step 80. -m From mdickey at snf.stanford.edu Tue Jun 26 06:41:49 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 26 Jun 2007 06:41:49 -0700 Subject: Comment teos2 SNF 2007-06-26 06:41:48: Clogged port Message-ID: Tube port is plugged and needs to be vacuumed out. Currently ramping down tube. From mdickey at snf.stanford.edu Tue Jun 26 14:24:46 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 26 Jun 2007 14:24:46 -0700 Subject: Comment teos2 SNF 2007-06-26 14:24:45: Testing Message-ID: Cleaned out tube port. Currently running a test From maurice at snf.stanford.edu Tue Jun 26 15:27:33 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Jun 2007 15:27:33 -0700 Subject: Shutdown teos2 SNF 2007-06-25 17:27:48: Pressure went to 2000/aborted Message-ID: Mike cleaned tube port and ran a 30 min deposition. Pressure stayed less that 1210 (setpoint 1200) From maurice at snf.stanford.edu Tue Jun 26 15:27:52 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Jun 2007 15:27:52 -0700 Subject: Comment teos2 SNF 2007-06-25 08:05:49: Test Message-ID: logged From maurice at snf.stanford.edu Tue Jun 26 15:28:21 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Jun 2007 15:28:21 -0700 Subject: Problem teos2 SNF 2007-06-24 19:40:44: mfs alarm, no deposition Message-ID: tube port clogged...Mike cleaned it From maurice at snf.stanford.edu Tue Jun 26 17:23:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Jun 2007 17:23:05 -0700 Subject: Shutdown teos2 SNF 2007-06-26 17:23:04: MFS alarm:Teos flow Message-ID: In step 115 (hold step before venting) Teos MFS shows flow of 60 sccm. Loaded pump program: teos flow stil dispays 60sccm From maurice at snf.stanford.edu Thu Jun 28 09:45:52 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Jun 2007 09:45:52 -0700 Subject: Shutdown teos2 SNF 2007-06-26 17:23:04: MFS alarm:Teos flow Message-ID: System will be yellow lighted. The teos MFC flows the correct value during deposition. But it falsely displays a flow when out of the deposition step. A new teos MFC has been ordered...it should arrave in 4 weeks. From maurice at snf.stanford.edu Thu Jun 28 09:47:51 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Jun 2007 09:47:51 -0700 Subject: Problem teos2 SNF 2007-06-28 09:47:51: Teos MFC error Message-ID: System will be yellow lighted. The teos MFC flows the correct value during deposition. But it falsely displays a flow when out of the deposition step. A new teos MFC has been ordered...it should arrave in 4 weeks. Speak with Ted or Maurice before using . We want to make sure you understand the issue. From maurice at snf.stanford.edu Thu Jun 28 09:48:03 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Jun 2007 09:48:03 -0700 Subject: Comment teos2 SNF 2007-06-26 14:24:45: Testing Message-ID: logged From maurice at snf.stanford.edu Thu Jun 28 09:48:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Jun 2007 09:48:23 -0700 Subject: Comment teos2 SNF 2007-06-26 06:41:48: Clogged port Message-ID: port cleaned by Mike From sanjah at snf.stanford.edu Fri Jun 29 20:54:00 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Fri, 29 Jun 2007 20:54:00 -0700 Subject: Problem teos2 SNF 2007-06-29 20:53:59: No deposition Message-ID: teos flow was 0 in dep step, MFC alarm