Shutdown teos2 SNF 2007-06-06 12:20:42: increasing pressure

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Wed Jun 6 12:20:43 PDT 2007


I watched the pressure during deposition and after a little while it slowly started increasing.  It was fine for a while but then it steadily increased from 1200 to ~2000 over a period of 5-10 minutes before kicking out and going to the next step.  




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