Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Wed Jun 20 09:47:10 PDT 2007
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Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change
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Problem teos2 SNF 2007-05-27 15:30:52: deposition stopping early
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Ampule changed and heating up. Next user will do a test
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Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change
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Problem teos2 SNF 2007-05-27 15:30:52: deposition stopping early
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