Problem teos2 SNF 2007-05-27 15:30:52: deposition stopping early
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Fri Jun 22 07:50:39 PDT 2007
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Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change
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Problem teos2 SNF 2007-06-24 19:40:44: mfs alarm, no deposition
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Cleaned trap
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Shutdown teos2 SNF 2007-06-20 08:34:45: Ampule change
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Problem teos2 SNF 2007-06-24 19:40:44: mfs alarm, no deposition
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