Shutdown teos2 SNF 2007-06-25 17:27:48: Pressure went to 2000/aborted

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Jun 25 17:27:49 PDT 2007

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Panjun and I watched the pressure climb to 2000mtorr within the first 10min of his deposition.
The program jumped to step 80.
-m

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