Shutdown teos2 SNF 2007-06-26 17:23:04: MFS alarm:Teos flow

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jun 26 17:23:05 PDT 2007

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In step 115  (hold step before venting)  Teos MFS shows flow of 60 sccm.
Loaded pump program: teos flow stil  dispays 60sccm

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