Shutdown teos2 SNF 2007-06-26 17:23:04: MFS alarm:Teos flow

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jun 28 09:45:52 PDT 2007


System will be yellow lighted.  The teos MFC flows the correct value during deposition.  But it falsely displays a flow when out of the deposition step.  
A new teos MFC has been ordered...it should arrave in 4 weeks.




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