Problem teos2 SNF 2007-06-29 20:53:59: No deposition
sanjah at snf.stanford.edu
sanjah at snf.stanford.edu
Fri Jun 29 20:54:00 PDT 2007
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Problem teos2 SNF 2007-06-28 09:47:51: Teos MFC error
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teos flow was 0 in dep step, MFC alarm
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Problem teos2 SNF 2007-06-28 09:47:51: Teos MFC error
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