From mdickey at snf.stanford.edu Tue May 1 13:26:40 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 May 2007 13:26:40 -0700 Subject: Comment teos2 SNF 2007-04-23 06:36:29: Ampule change Message-ID: Noted From mdickey at snf.stanford.edu Tue May 1 13:27:01 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 May 2007 13:27:01 -0700 Subject: Problem teos2 SNF 2007-04-21 04:21:42: not pumping down Message-ID: FIxed From mdickey at snf.stanford.edu Tue May 1 13:27:31 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 May 2007 13:27:31 -0700 Subject: Problem teos2 SNF 2007-04-21 10:24:27: More Pump Information Message-ID: Pulled and cleaned tube. In coat right now. Will need test when done. From mdickey at snf.stanford.edu Wed May 2 13:56:09 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 2 May 2007 13:56:09 -0700 Subject: Comment teos2 SNF 2007-05-02 13:56:09: Blower Message-ID: Blower sent out for rebuild From mtang at snf.stanford.edu Fri May 4 09:16:03 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 4 May 2007 09:16:03 -0700 Subject: Comment teos2 SNF 2007-05-04 09:16:02: Pump prognosis - 4 weeks? Message-ID: The blower and pump have been sent out for rebuild. Typical turnaround time is 4 weeks (!!??!) Ted has requested that this be expedited, but no word yet back from the vendor who needs to check the package out first. We'll keep you updated. If you have immediate TEOS needs, contact your friendly neighborhood process staff member for some possible sources. From tberg at snf.stanford.edu Mon May 14 14:52:56 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 May 2007 14:52:56 -0700 Subject: Comment teos2 SNF 2007-05-14 14:52:56: Pump back but has issues Message-ID: FS to be in tomorrow to check it out From tberg at snf.stanford.edu Tue May 15 12:18:21 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 May 2007 12:18:21 -0700 Subject: Comment teos2 SNF 2007-05-15 12:18:21: Pump bad out for repair Message-ID: From maurice at snf.stanford.edu Wed May 16 13:27:09 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 May 2007 13:27:09 -0700 Subject: Shutdown teos2 SNF 2007-04-21 10:33:41: pump program not working Message-ID: Pump sent out for repair From mdickey at snf.stanford.edu Thu May 17 06:38:40 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 17 May 2007 06:38:40 -0700 Subject: Shutdown teos2 SNF 2007-05-17 06:38:39: Pump Message-ID: Pump out for repair From shott at snf.stanford.edu Sat May 19 08:23:13 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 May 2007 08:23:13 -0700 Subject: Shutdown teos2 SNF 2007-05-19 08:23:13: Needs restart after power failure ... Message-ID: From seymour at snf.stanford.edu Mon May 21 13:47:55 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:47:55 -0700 Subject: Shutdown teos2 SNF 2007-05-19 08:23:13: Needs restart after power failure ... Message-ID: restart and checkout complete From seymour at snf.stanford.edu Mon May 21 13:48:30 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:48:30 -0700 Subject: Shutdown teos2 SNF 2007-05-17 06:38:39: Pump Message-ID: system pumping normally now. Needs test after repair From seymour at snf.stanford.edu Mon May 21 13:48:48 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:48:48 -0700 Subject: Comment teos2 SNF 2007-05-04 09:16:02: Pump prognosis - 4 weeks? Message-ID: noted From seymour at snf.stanford.edu Mon May 21 13:49:04 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:49:04 -0700 Subject: Comment teos2 SNF 2007-05-02 13:56:09: Blower Message-ID: rebuilt From seymour at snf.stanford.edu Mon May 21 13:49:26 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:49:26 -0700 Subject: Comment teos2 SNF 2007-05-14 14:52:56: Pump back but has issues Message-ID: returned and working From seymour at snf.stanford.edu Mon May 21 13:49:54 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:49:54 -0700 Subject: Comment teos2 SNF 2007-05-15 12:18:21: Pump bad out for repair Message-ID: pump working as required. From seymour at snf.stanford.edu Mon May 21 13:50:24 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 May 2007 13:50:24 -0700 Subject: Problem teos2 SNF 2007-05-21 13:50:23: system needs test after pump rebuild Message-ID: From maurice at snf.stanford.edu Mon May 21 16:31:08 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 May 2007 16:31:08 -0700 Subject: Comment teos2 SNF 2007-05-21 16:31:07: running test Message-ID: From maurice at snf.stanford.edu Mon May 21 18:10:58 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 May 2007 18:10:58 -0700 Subject: Comment teos2 SNF 2007-05-21 18:10:58: will read test results in the morning Message-ID: From maurice at snf.stanford.edu Tue May 22 10:41:47 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 May 2007 10:41:47 -0700 Subject: Problem teos2 SNF 2007-05-21 13:50:23: system needs test after pump rebuild Message-ID: expected .1um actual 0.09um green light From maurice at snf.stanford.edu Tue May 22 10:41:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 May 2007 10:41:59 -0700 Subject: Comment teos2 SNF 2007-05-21 16:31:07: running test Message-ID: test good From maurice at snf.stanford.edu Tue May 22 10:42:08 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 May 2007 10:42:08 -0700 Subject: Comment teos2 SNF 2007-05-21 18:10:58: will read test results in the morning Message-ID: test good From seymour at snf.stanford.edu Tue May 22 14:56:37 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 14:56:37 -0700 Subject: Shutdown teos2 SNF 2007-05-22 14:56:37: no teos flow Message-ID: From tberg at snf.stanford.edu Wed May 23 07:10:02 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 May 2007 07:10:02 -0700 Subject: Shutdown teos2 SNF 2007-05-22 14:56:37: no teos flow Message-ID: TEOS is flowing after MFC reset From grahamab at snf.stanford.edu Sun May 27 15:30:53 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 27 May 2007 15:30:53 -0700 Subject: Problem teos2 SNF 2007-05-27 15:30:52: deposition stopping early Message-ID: TEOS2VH ends deposition step early with no alarm. Despite deposition pressure reading right on 1200, I'm guessing it's spiking at some point and kicking out of the step. This has happened on two consecutive depositions, but both were perfectly normal for the first 10-15 minutes of dep (at which point I left the lab...2.5 hour dep). EricP said there was a similar problem on tylannitride a couple years ago that was a result of a faulty gate valve. Similar problem this time? From maurice at snf.stanford.edu Tue May 29 09:41:14 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 May 2007 09:41:14 -0700 Subject: Shutdown teos2 SNF 2007-05-29 09:41:13: PROCESS MIDDLE OF ENDING IN DEP CYCLE Message-ID: From mdickey at snf.stanford.edu Tue May 29 14:36:41 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 29 May 2007 14:36:41 -0700 Subject: Shutdown teos2 SNF 2007-05-29 09:41:13: PROCESS MIDDLE OF ENDING IN DEP CYCLE Message-ID: Ran 30 minutes of dep with no problems other than high process pressure From mdickey at snf.stanford.edu Tue May 29 14:37:52 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 29 May 2007 14:37:52 -0700 Subject: Problem teos2 SNF 2007-05-29 14:37:51: High pressure Message-ID: Process pressure is high during dep. Will inspect throttle valve tomorrow morning. Run at your own risk. From mdickey at snf.stanford.edu Wed May 30 07:50:38 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2007 07:50:38 -0700 Subject: Shutdown teos2 SNF 2007-05-30 07:50:37: Tube port Message-ID: Cooling the tube so the tube port can be cleaned out From mdickey at snf.stanford.edu Wed May 30 13:38:38 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2007 13:38:38 -0700 Subject: Comment teos2 SNF 2007-05-30 13:38:38: Testing Message-ID: Cleaned tube port, throttle valve and abatement system. Running a recipe to monitor pressure during dep. From mdickey at snf.stanford.edu Wed May 30 14:24:23 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2007 14:24:23 -0700 Subject: Shutdown teos2 SNF 2007-05-30 07:50:37: Tube port Message-ID: Test needed after test run. Pressure is back to normal From sanjah at snf.stanford.edu Thu May 31 00:25:55 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Thu, 31 May 2007 00:25:55 -0700 Subject: Comment teos2 SNF 2007-05-31 00:25:55: dep. rate OK Message-ID: Run TEOS2VH 2x1h40min (flipped the wafers inbetween the runs). Test wafer: T-10116, C-9812, B-10294, L-10000, R-10039 AA From mislam at snf.stanford.edu Thu May 31 14:45:36 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 31 May 2007 14:45:36 -0700 Subject: Problem teos2 SNF 2007-05-31 14:45:36: Dep aborted by itself Message-ID: Deposition started ok but jumped to step 110 sometime during the dep. Got 1000A TEOS, expecting 1um.