Comment teos2 SNF 2007-05-30 13:38:38: Testing

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Wed May 30 13:38:38 PDT 2007


Cleaned tube port, throttle valve and abatement system. 
Running a recipe to monitor pressure during dep.




More information about the teos2-pcs mailing list