Comment teos2 SNF 2007-05-31 00:25:55: dep. rate OK

sanjah at snf.stanford.edu sanjah at snf.stanford.edu
Thu May 31 00:25:55 PDT 2007


Run TEOS2VH 2x1h40min (flipped the wafers inbetween the runs). Test wafer: T-10116, C-9812, B-10294, L-10000, R-10039 AA




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