Problem teos2 SNF 2007-05-31 14:45:36: Dep aborted by itself

mislam at snf.stanford.edu mislam at snf.stanford.edu
Thu May 31 14:45:36 PDT 2007


Deposition started ok but jumped to step 110 sometime
during the dep. Got 1000A TEOS, expecting 1um.




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