From seymour at snf.stanford.edu Tue Sep 11 14:48:27 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 11 Sep 2007 14:48:27 -0700 Subject: Shutdown teos2 SNF 2007-09-11 14:48:27: failed leak tube check Message-ID: From mdickey at snf.stanford.edu Wed Sep 12 08:28:21 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 12 Sep 2007 08:28:21 -0700 Subject: Comment teos2 SNF 2007-09-12 08:28:20: Abatement Message-ID: Running N2 through the abatement system to try to rule out outgasing problem or possible leak From mdickey at snf.stanford.edu Wed Sep 12 14:33:33 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 12 Sep 2007 14:33:33 -0700 Subject: Shutdown teos2 SNF 2007-09-11 14:48:27: failed leak tube check Message-ID: Found leak at ultra torre fitting From mdickey at snf.stanford.edu Wed Sep 12 14:34:40 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 12 Sep 2007 14:34:40 -0700 Subject: Comment teos2 SNF 2007-09-12 14:34:38: Test done Message-ID: Ran Teos2vh2 with 20 minute dep. No O2 flow problems. Ready for use. From maurice at snf.stanford.edu Thu Sep 13 11:58:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Sep 2007 11:58:43 -0700 Subject: Shutdown teos2 SNF 2007-09-13 11:58:42: tempL low Message-ID: From maurice at snf.stanford.edu Thu Sep 13 11:59:54 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Sep 2007 11:59:54 -0700 Subject: Comment teos2 SNF 2007-09-13 11:59:53: tempL low during dep Message-ID: Pan Jun wafers are in the tube From tberg at snf.stanford.edu Thu Sep 13 12:30:56 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Sep 2007 12:30:56 -0700 Subject: Shutdown teos2 SNF 2007-09-13 11:58:42: tempL low Message-ID: Temp is ok reseated TC From tberg at snf.stanford.edu Thu Sep 13 12:31:21 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Sep 2007 12:31:21 -0700 Subject: Comment teos2 SNF 2007-09-13 11:59:53: tempL low during dep Message-ID: Reseated TC temp OK run is running From tberg at snf.stanford.edu Thu Sep 13 12:31:56 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Sep 2007 12:31:56 -0700 Subject: Comment teos2 SNF 2007-09-12 08:28:20: Abatement Message-ID: noted From panjun at snf.stanford.edu Thu Sep 13 19:54:51 2007 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Thu, 13 Sep 2007 19:54:51 -0700 Subject: Problem teos2 SNF 2007-09-13 19:54:50: boat can't come out automatically Message-ID: boat failed to come out automatically either before loading or after deposition From panjun at snf.stanford.edu Thu Sep 13 19:59:34 2007 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Thu, 13 Sep 2007 19:59:34 -0700 Subject: Problem teos2 SNF 2007-09-13 19:59:33: unstable temperature Message-ID: in the deposition this morning, the templ was 250, which was later corrected by staff in the evening deposition, the temps is 250 at the beginning of step 70, and later jumped to 702.0B. TCU% is 0 sometimes From mdickey at snf.stanford.edu Fri Sep 14 08:37:44 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 14 Sep 2007 08:37:44 -0700 Subject: Problem teos2 SNF 2007-09-13 19:54:50: boat can't come out automatically Message-ID: Door adjusted. Boat in/out works now. From seymour at snf.stanford.edu Fri Sep 21 11:14:36 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 21 Sep 2007 11:14:36 -0700 Subject: Shutdown teos2 SNF 2007-09-21 11:14:35: tube not pumping down Message-ID: tube neck needs to be cleaned. element breaker is off and tube is cooling down for the clean. From mdickey at snf.stanford.edu Mon Sep 24 14:22:45 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 24 Sep 2007 14:22:45 -0700 Subject: Comment teos2 SNF 2007-09-24 14:22:45: Tube pull Message-ID: The tube is going to be replaced in the morning. Tube would not pump down and leak could not be found From seymour at snf.stanford.edu Fri Sep 28 08:02:50 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 Sep 2007 08:02:50 -0700 Subject: Comment teos2 SNF 2007-09-28 08:02:49: repair actions Message-ID: gate valve will not respond to MFS460 controller. I have replaced the front panel wiith membrane switch and microprocessor board with out getting proper response. valve will respond to external powersupply. Gasses will turn on but the MFS460 remains locked in manual.