From panjun at snf.stanford.edu Thu Apr 3 13:21:47 2008 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Thu, 3 Apr 2008 13:21:47 -0700 Subject: Problem teos2 SNF 2008-04-03 13:21:46: low deposition rate again Message-ID: at step 70, the deposition rate is only ~500 got about half the expected thickness From panjun at snf.stanford.edu Thu Apr 3 14:01:55 2008 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Thu, 3 Apr 2008 14:01:55 -0700 Subject: Problem teos2 SNF 2008-04-03 14:01:54: the pressure Message-ID: the pressure actually is quite unstable, jump between 4xx to 8xx From tberg at snf.stanford.edu Fri Apr 4 07:34:11 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:34:11 -0700 Subject: Comment teos2 SNF 2008-03-26 20:20:33: pressure good again 1200mtorr Message-ID: Noted From tberg at snf.stanford.edu Fri Apr 4 07:35:26 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:35:26 -0700 Subject: Problem teos2 SNF 2008-04-03 13:21:46: low deposition rate again Message-ID: Cleaned Throttle valve and checked operational flows and pressures looks good From tberg at snf.stanford.edu Fri Apr 4 07:36:24 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:36:24 -0700 Subject: Problem teos2 SNF 2008-04-03 14:01:54: the pressure Message-ID: Cleaned Throttle valve and checked operational flows and pressures looks good From tberg at snf.stanford.edu Fri Apr 4 07:36:39 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:36:39 -0700 Subject: Comment teos2 SNF 2008-03-25 15:33:18: above comments meant for BPSG Message-ID: noted From tberg at snf.stanford.edu Fri Apr 4 07:36:49 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:36:49 -0700 Subject: Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line Message-ID: noted From tberg at snf.stanford.edu Fri Apr 4 07:37:08 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:37:08 -0700 Subject: Comment teos2 SNF 2008-03-25 15:36:26: needs test after coat using TEOS2VH recipe Message-ID: done From seymour at snf.stanford.edu Mon Apr 7 15:25:25 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Apr 2008 15:25:25 -0700 Subject: Shutdown teos2 SNF 2008-04-07 15:25:25: cooling down for a pull and clean Message-ID: From seymour at snf.stanford.edu Thu Apr 10 14:05:24 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Apr 2008 14:05:24 -0700 Subject: Comment teos2 SNF 2008-04-10 14:05:23: pull and clean completed Message-ID: Leak check good. tube coated and ready for test. From maurice at snf.stanford.edu Thu Apr 10 17:47:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Apr 2008 17:47:19 -0700 Subject: Comment teos2 SNF 2008-04-10 14:05:23: pull and clean completed Message-ID: Test complete. Expected ~.2um Actual ~.16um From maurice at snf.stanford.edu Thu Apr 10 17:47:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Apr 2008 17:47:50 -0700 Subject: Shutdown teos2 SNF 2008-04-07 15:25:25: cooling down for a pull and clean Message-ID: Pulled, cleaned,coated and tested. Expected ~.2um Actual ~.16um From cmcg at snf.stanford.edu Sun Apr 20 23:09:55 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 20 Apr 2008 23:09:55 -0700 Subject: Comment teos2 SNF 2008-04-20 23:09:55: low deposition rate.... Message-ID: Deposition rate was about 1/2 of what expected. Missed the pressure reading during deposition. Will run test batch again tomorrow, 4/21/08, and check pressure. From seymour at snf.stanford.edu Mon Apr 21 08:46:42 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Apr 2008 08:46:42 -0700 Subject: Comment teos2 SNF 2008-04-21 08:46:41: cleaned throttle valve Message-ID: cleaned and tested throttle valve for full open and close. From maurice at snf.stanford.edu Mon Apr 21 11:10:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Apr 2008 11:10:07 -0700 Subject: Shutdown teos2 SNF 2008-04-21 11:10:05: Teos Interlock Message-ID: No teos flow in dep step From seymour at snf.stanford.edu Mon Apr 21 11:17:26 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Apr 2008 11:17:26 -0700 Subject: Comment teos2 SNF 2008-04-21 11:17:26: teos at lo level Message-ID: cooling off to allow changing From seymour at snf.stanford.edu Mon Apr 21 11:53:56 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Apr 2008 11:53:56 -0700 Subject: Comment teos2 SNF 2008-04-21 11:53:55: TEOS replaced Message-ID: container heating up at this time From seymour at snf.stanford.edu Mon Apr 21 13:16:26 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Apr 2008 13:16:26 -0700 Subject: Shutdown teos2 SNF 2008-04-21 11:10:05: Teos Interlock Message-ID: Teos up to temp and flowed at setpoint. putting to yellow to wait for a test. From seymour at snf.stanford.edu Mon Apr 21 13:16:55 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Apr 2008 13:16:55 -0700 Subject: Problem teos2 SNF 2008-04-21 13:16:54: needs a test after teos replaced Message-ID: From cmcg at snf.stanford.edu Thu Apr 24 13:19:16 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 24 Apr 2008 13:19:16 -0700 Subject: Problem teos2 SNF 2008-04-24 13:19:15: dep rate still low ~18 A/min, instead of ~40 A/min Message-ID: Average Dep Rate for past 4 runs: 40.30 (typical rate) 37.33 12.17 aborted run, out of teos...run time unclear 18.02 (after teos replaced) running test again now, will check teos flow From cmcg at snf.stanford.edu Thu Apr 24 21:42:33 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 24 Apr 2008 21:42:33 -0700 Subject: Problem teos2 SNF 2008-04-24 21:42:33: dep rate still low, 18.54A/min, low pressure Message-ID: Dep rate is still about half what it is typically TEOS flow ~60 O2 flow ~300 Pressure during deposition was 300-400, not 1200 From tberg at snf.stanford.edu Fri Apr 25 08:45:00 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 Apr 2008 08:45:00 -0700 Subject: Comment teos2 SNF 2008-04-25 08:44:59: Adjusted Throttle valve controller Message-ID: Pressure looks OK now will observe From cmcg at snf.stanford.edu Mon Apr 28 15:53:50 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 28 Apr 2008 15:53:50 -0700 Subject: Comment teos2 SNF 2008-04-28 15:53:49: dep rate normal again, 42 A/min Message-ID: average dep rate across 5 wafers: 42A/min pressure during dep: 1206 O2: 300 TEOS: 60 From tberg at snf.stanford.edu Tue Apr 29 06:02:18 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:02:18 -0700 Subject: Problem teos2 SNF 2008-04-24 21:42:33: dep rate still low, 18.54A/min, low pressure Message-ID: Adjusted TV controller User reports normal Dep From tberg at snf.stanford.edu Tue Apr 29 06:02:49 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:02:49 -0700 Subject: Comment teos2 SNF 2008-04-20 23:09:55: low deposition rate.... Message-ID: Adjusted TV controller User reports normal Dep From tberg at snf.stanford.edu Tue Apr 29 06:02:59 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:02:59 -0700 Subject: Comment teos2 SNF 2008-04-21 08:46:41: cleaned throttle valve Message-ID: Adjusted TV controller User reports normal Dep From tberg at snf.stanford.edu Tue Apr 29 06:03:23 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:03:23 -0700 Subject: Comment teos2 SNF 2008-04-21 11:17:26: teos at lo level Message-ID: Replaced cannister From tberg at snf.stanford.edu Tue Apr 29 06:03:32 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:03:32 -0700 Subject: Comment teos2 SNF 2008-04-21 11:53:55: TEOS replaced Message-ID: Noted From tberg at snf.stanford.edu Tue Apr 29 06:04:07 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:04:07 -0700 Subject: Problem teos2 SNF 2008-04-21 13:16:54: needs a test after teos replaced Message-ID: Adjusted TV controller Dep rate good From tberg at snf.stanford.edu Tue Apr 29 06:04:15 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:04:15 -0700 Subject: Problem teos2 SNF 2008-04-24 13:19:15: dep rate still low ~18 A/min, instead of ~40 A/min Message-ID: Adjusted TV controller Dep rate good From tberg at snf.stanford.edu Tue Apr 29 06:04:23 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:04:23 -0700 Subject: Comment teos2 SNF 2008-04-25 08:44:59: Adjusted Throttle valve controller Message-ID: Adjusted TV controller Dep rate good From tberg at snf.stanford.edu Tue Apr 29 06:04:33 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Apr 2008 06:04:33 -0700 Subject: Comment teos2 SNF 2008-04-28 15:53:49: dep rate normal again, 42 A/min Message-ID: noted