Comment teos2 SNF 2008-03-25 15:36:26: needs test after coat using TEOS2VH recipe
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Fri Apr 4 07:37:08 PDT 2008
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Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line
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Shutdown teos2 SNF 2008-04-07 15:25:25: cooling down for a pull and clean
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done
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Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line
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Shutdown teos2 SNF 2008-04-07 15:25:25: cooling down for a pull and clean
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