Problem teos2 SNF 2008-04-24 21:42:33: dep rate still low, 18.54A/min, low pressure

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Thu Apr 24 21:42:33 PDT 2008


Dep rate is still about half what it is typically
TEOS flow ~60
O2 flow ~300
Pressure during deposition was 300-400, not 1200




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