Comment teos2 SNF 2008-04-28 15:53:49: dep rate normal again, 42 A/min

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Mon Apr 28 15:53:50 PDT 2008


average dep rate across 5 wafers: 42A/min
pressure during dep: 1206
O2: 300
TEOS: 60




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