April 2008 Archives by author

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Starting: Thu Apr 3 13:21:47 PDT 2008
Ending: Tue Apr 29 06:04:33 PDT 2008
Messages: 32

• Comment teos2 SNF 2008-04-20 23:09:55: low deposition rate....   cmcg at snf.stanford.edu
• Problem teos2 SNF 2008-04-24 13:19:15: dep rate still low ~18 A/min, instead of ~40 A/min   cmcg at snf.stanford.edu
• Problem teos2 SNF 2008-04-24 21:42:33: dep rate still low, 18.54A/min, low pressure   cmcg at snf.stanford.edu
• Comment teos2 SNF 2008-04-28 15:53:49: dep rate normal again, 42 A/min   cmcg at snf.stanford.edu
• Comment teos2 SNF 2008-04-10 14:05:23: pull and clean completed   maurice at snf.stanford.edu
• Shutdown teos2 SNF 2008-04-07 15:25:25: cooling down for a pull and clean   maurice at snf.stanford.edu
• Shutdown teos2 SNF 2008-04-21 11:10:05: Teos Interlock   maurice at snf.stanford.edu
• Problem teos2 SNF 2008-04-03 13:21:46: low deposition rate again   panjun at snf.stanford.edu
• Problem teos2 SNF 2008-04-03 14:01:54: the pressure   panjun at snf.stanford.edu
• Shutdown teos2 SNF 2008-04-07 15:25:25: cooling down for a pull and clean   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-04-10 14:05:23: pull and clean completed   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-04-21 08:46:41: cleaned throttle valve   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-04-21 11:17:26: teos at lo level   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-04-21 11:53:55: TEOS replaced   seymour at snf.stanford.edu
• Shutdown teos2 SNF 2008-04-21 11:10:05: Teos Interlock   seymour at snf.stanford.edu
• Problem teos2 SNF 2008-04-21 13:16:54: needs a test after teos replaced   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-26 20:20:33: pressure good again 1200mtorr   tberg at snf.stanford.edu
• Problem teos2 SNF 2008-04-03 13:21:46: low deposition rate again   tberg at snf.stanford.edu
• Problem teos2 SNF 2008-04-03 14:01:54: the pressure   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-03-25 15:33:18: above comments meant for BPSG   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-03-25 15:36:26: needs test after coat using TEOS2VH recipe   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-25 08:44:59: Adjusted Throttle valve controller   tberg at snf.stanford.edu
• Problem teos2 SNF 2008-04-24 21:42:33: dep rate still low, 18.54A/min, low pressure   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-20 23:09:55: low deposition rate....   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-21 08:46:41: cleaned throttle valve   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-21 11:17:26: teos at lo level   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-21 11:53:55: TEOS replaced   tberg at snf.stanford.edu
• Problem teos2 SNF 2008-04-21 13:16:54: needs a test after teos replaced   tberg at snf.stanford.edu
• Problem teos2 SNF 2008-04-24 13:19:15: dep rate still low ~18 A/min, instead of ~40 A/min   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-25 08:44:59: Adjusted Throttle valve controller   tberg at snf.stanford.edu
• Comment teos2 SNF 2008-04-28 15:53:49: dep rate normal again, 42 A/min   tberg at snf.stanford.edu

Last message date: Tue Apr 29 06:04:33 PDT 2008
Archived on: Sun Dec 23 09:24:59 PST 2012

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