From cmcg at snf.stanford.edu  Mon Aug 18 18:26:49 2008
From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu)
Date: Mon, 18 Aug 2008 18:26:49 -0700
Subject: Shutdown teos2 SNF 2008-08-18 18:26:48: pump still down
Message-ID: <mailman.490.1356283490.4766.teos2-pcs@snf.stanford.edu>

vaccuum pump is still down from power outage.  Wafers are still inside, please leave until tomorrow morning (08/19/08)



From tberg at snf.stanford.edu  Tue Aug 19 06:45:45 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 19 Aug 2008 06:45:45 -0700
Subject: Shutdown teos2 SNF 2008-08-18 18:26:48: pump still down
Message-ID: <mailman.491.1356283490.4766.teos2-pcs@snf.stanford.edu>

Turned on pump and loadedPump7



From seymour at snf.stanford.edu  Thu Aug 28 08:12:29 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 28 Aug 2008 08:12:29 -0700
Subject: Shutdown teos2 SNF 2008-08-28 08:12:28: tube pump port needs cleaning
Message-ID: <mailman.492.1356283490.4766.teos2-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Thu Aug 28 14:17:08 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 28 Aug 2008 14:17:08 -0700
Subject: Shutdown teos2 SNF 2008-08-28 08:12:28: tube pump port needs cleaning
Message-ID: <mailman.493.1356283490.4766.teos2-pcs@snf.stanford.edu>

Cleaned tube port and throttle valve. Pumped and purged tubereleasing tube for use.. 



From cmcg at snf.stanford.edu  Fri Aug 29 13:56:42 2008
From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu)
Date: Fri, 29 Aug 2008 13:56:42 -0700
Subject: Problem teos2 SNF 2008-08-29 13:56:42: low temp 300C
Message-ID: <mailman.494.1356283490.4766.teos2-pcs@snf.stanford.edu>

Temperature stays around 300C during deposition.  Program set for 680C



From seymour at snf.stanford.edu  Fri Aug 29 14:43:00 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 29 Aug 2008 14:43:00 -0700
Subject: Problem teos2 SNF 2008-08-29 13:56:42: low temp 300C
Message-ID: <mailman.495.1356283490.4766.teos2-pcs@snf.stanford.edu>

when I went in and checked the temp on the tycom it was highler then setpoint of 550 at step 110 which I think is a cool down
step. But the front panel was reading much lower around the 300 degs on the write up. I cycled element power switches and reset the tcu board. Front panel now reads correct and the tycom power readings look normal.