From rhenn at snf.stanford.edu Tue Feb 5 19:04:50 2008 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Tue, 5 Feb 2008 19:04:50 -0800 Subject: Shutdown teos2 SNF 2008-02-05 19:04:50: MFS Alarm / Failed Gross Leak / Pump7 Abort Message-ID: MFS alarm occurred in step 30. O2 was not flowing when it should have been. In step 40, the tube failed gross leak check with a prcpr ~2000. After failing gross leak, I aborted the run and waited ~20 mins before pulling my wafer out. The orange gasket ring at the front of the tube seems to be partially detached from its location. Ran program pump7 and the program alarmed and aborted. Reran program pump7 and program aborted. From mdickey at snf.stanford.edu Wed Feb 6 06:48:28 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 6 Feb 2008 06:48:28 -0800 Subject: Comment teos2 SNF 2008-02-06 06:48:28: Gasket Message-ID: Part of the door gasket has melted onto the surface of the tube The tube is cooling down so it can be cleaned off and the door gasket can be replaced. From mdickey at snf.stanford.edu Wed Feb 6 09:02:03 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 6 Feb 2008 09:02:03 -0800 Subject: Shutdown teos2 SNF 2008-02-05 19:04:50: MFS Alarm / Failed Gross Leak / Pump7 Abort Message-ID: Replaced door gasket. Ready for use. From mdickey at snf.stanford.edu Wed Feb 6 09:02:11 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 6 Feb 2008 09:02:11 -0800 Subject: Comment teos2 SNF 2008-02-06 06:48:28: Gasket Message-ID: Replaced From seymour at snf.stanford.edu Fri Feb 8 08:56:24 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Feb 2008 08:56:24 -0800 Subject: Shutdown teos2 SNF 2008-02-08 08:56:23: not pumping down after power glitch Message-ID: From mdickey at snf.stanford.edu Mon Feb 11 06:55:23 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 11 Feb 2008 06:55:23 -0800 Subject: Comment teos2 SNF 2008-02-11 06:55:22: Tube pull Message-ID: Tube needs to be replaced because of a chip on the sealing surface From mdickey at snf.stanford.edu Mon Feb 11 12:51:10 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 11 Feb 2008 12:51:10 -0800 Subject: Comment teos2 SNF 2008-02-11 12:51:10: Injector Message-ID: System is back together. Just waiting for LP Glass to deliver an injector From mdickey at snf.stanford.edu Mon Feb 11 14:23:32 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 11 Feb 2008 14:23:32 -0800 Subject: Comment teos2 SNF 2008-02-11 14:23:31: HEating up Message-ID: Injector installed and tube is heating up. Maurice to run a coat program From maurice at snf.stanford.edu Mon Feb 11 16:23:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:23:20 -0800 Subject: Comment teos2 SNF 2008-02-11 16:23:18: coating Message-ID: running coat program From maurice at snf.stanford.edu Mon Feb 11 16:37:59 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:37:59 -0800 Subject: Shutdown teos2 SNF 2008-02-08 08:56:23: not pumping down after power glitch Message-ID: Tube replaced because of a chip on the sealing surface From maurice at snf.stanford.edu Mon Feb 11 16:38:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:38:07 -0800 Subject: Comment teos2 SNF 2008-02-11 06:55:22: Tube pull Message-ID: Tube replaced because of a chip on the sealing surface From maurice at snf.stanford.edu Mon Feb 11 16:38:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:38:20 -0800 Subject: Comment teos2 SNF 2008-02-11 12:51:10: Injector Message-ID: logged From maurice at snf.stanford.edu Mon Feb 11 16:38:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:38:39 -0800 Subject: Comment teos2 SNF 2008-02-11 14:23:31: HEating up Message-ID: logged From maurice at snf.stanford.edu Mon Feb 11 16:38:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:38:58 -0800 Subject: Comment teos2 SNF 2008-02-11 16:23:18: coating Message-ID: coat complete...needs test From maurice at snf.stanford.edu Mon Feb 11 16:39:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:39:17 -0800 Subject: Problem teos2 SNF 2008-02-11 16:39:16: Needs test after tube pull Message-ID: From maurice at snf.stanford.edu Wed Feb 13 09:29:31 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:29:31 -0800 Subject: Problem teos2 SNF 2008-02-11 16:39:16: Needs test after tube pull Message-ID: Panjun ran system last night and didn't report any problems