Problem teos2 SNF 2008-07-22 13:02:52: mfs alarm, o2 problem?

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Tue Jul 22 13:02:53 PDT 2008


MFS alarm on step 30, O2 flow = 0....
After step 35 process skipped to step 120 for venting
pressure stayed at 2000mTorr the whole time




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