Shutdown teos2 SNF 2008-03-18 18:38:29: Not depositting

rik at snf.stanford.edu rik at snf.stanford.edu
Tue Mar 18 18:38:29 PDT 2008


Ran 2 deposition tests to deposit 1 um of TEOS. First run gave 30nm dep, 2nd run gave 200nm dep. Checked TEOS flow during 2nd run, and it was hovering around .1 instead of .6.




More information about the teos2-pcs mailing list