Comment teos2 SNF 2008-03-19 11:48:57: teos flow unstable

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed Mar 19 11:48:58 PDT 2008


I turned off the source valve and pumped on the teos line untill flow steadly dropped. I then turned on source and teos flowed at setpoint of 60 SCCM. Maurice is going to run a test.




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