Shutdown teos2 SNF 2008-03-18 18:38:29: Not depositting

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Mar 19 15:28:41 PDT 2008


Ray drained then charged the teos line then let it flow at 60 sccm.  Looked ok.
We then ran teos2vh2   01:20:00  standard flow, pressure and temp
teos flow was normal during run
expected 2900A   actual 2681A




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