Comment teos2 SNF 2008-03-21 09:38:12: Low Pressure during Deposition

ywidjaja at snf.stanford.edu ywidjaja at snf.stanford.edu
Fri Mar 21 09:38:12 PDT 2008


Deposition Pressure is ~600 mtorr (setpoint = 1200 mtorr).  TEOS and O2 flows are normal.  Deposition rate is ~70% of what is expected.  




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