Problem teos2 SNF 2008-03-24 06:30:32: Low Deposition Pressure

ywidjaja at snf.stanford.edu ywidjaja at snf.stanford.edu
Mon Mar 24 06:30:33 PDT 2008


Repeat TEOS2VH run and encountered low pressure during deposition step again.  From logbook, previous user also encountered similar problem.  TEOS and O2 flow normal.
Some guidelines from my runs (use this to compensate depo time -- HOLD during deposition step):
Pressure = 500-600 mtorr, depo rate ~60-70% of expected
Pressure = 400 mtorr, depo rate ~50% of expected




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