Comment teos2 SNF 2008-03-24 11:05:15: Deposition pressure low

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Mar 24 11:05:15 PDT 2008


Running teos2vh2   02:00:00
pressure set point 1200mtorr
actual pressure  423.9 mtor




More information about the teos2-pcs mailing list